High speed silicon wet anisotropic etching for applications in bulk micromachining: a review
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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2213-9621
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Anmerkungen
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online resource.
- Erschienen in
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High speed silicon wet anisotropic etching for applications in bulk micromachining: a review ; volume:9 ; number:1 ; day:22 ; month:2 ; year:2021 ; pages:1-59 ; date:12.2021
Micro and Nano Systems Letters ; 9, Heft 1 (22.2.2021), 1-59, 12.2021
- Urheber
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Pal, Prem
Swarnalatha, Veerla
Rao, Avvaru Venkata Narasimha
Pandey, Ashok Kumar
Tanaka, Hiroshi
Sato, Kazuo
- Beteiligte Personen und Organisationen
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SpringerLink (Online service)
- DOI
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10.1186/s40486-021-00129-0
- URN
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urn:nbn:de:101:1-2021041008151622643313
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:55 MESZ
Datenpartner
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Beteiligte
- Pal, Prem
- Swarnalatha, Veerla
- Rao, Avvaru Venkata Narasimha
- Pandey, Ashok Kumar
- Tanaka, Hiroshi
- Sato, Kazuo
- SpringerLink (Online service)
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