- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2213-9621
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Highly controllable and reliable ultra-thin Parylene deposition ; volume:6 ; number:1 ; day:10 ; month:10 ; year:2018 ; pages:1-7 ; date:12.2018
Micro and Nano Systems Letters ; 6, Heft 1 (10.10.2018), 1-7, 12.2018
- Classification
-
Ingenieurwissenschaften und Maschinenbau
- Creator
-
Liu, Yaoping
- Contributor
-
Kang, Dongyang
Dai, Wangzhi
Li, Haida
Wang, Wei
Tai, Yu-Chong
SpringerLink (Online service)
- DOI
-
10.1186/s40486-018-0067-0
- URN
-
urn:nbn:de:101:1-2018111820000235612614
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:49 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Liu, Yaoping
- Kang, Dongyang
- Dai, Wangzhi
- Li, Haida
- Wang, Wei
- Tai, Yu-Chong
- SpringerLink (Online service)
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