Hochschulschrift
Development and characterization of the 3C-SiC-SOI material system for high temperature piezoresistive pressure microsensors
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783183358090
3183358093
- Dimensions
-
21 cm
- Extent
-
XVI, 154 S.
- Edition
-
Als Ms. gedr.
- Language
-
Englisch
- Notes
-
Ill., graph. Darst.
Zugl.: Berlin, Techn. Univ., Diss.
- Bibliographic citation
-
Fortschrittberichte VDI / 9 / Verein Deutscher Ingenieure ; Nr. 358, Reihe 9
- Keyword
-
Halbleiterdrucksensor
Mikrosensor
Hochtemperaturtechnik
Siliciumcarbid
Kubisches Gitter
SOI-Technik
- Event
-
Veröffentlichung
- (where)
-
Düsseldorf
- (who)
-
VDI-Verl.
- (when)
-
2002
- Creator
-
Zappe, Stefan
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.06.2025, 1:42 PM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Hochschulschrift
Associated
- Zappe, Stefan
- VDI-Verl.
Time of origin
- 2002
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