Offset stable piezoresistive high-temperature pressure sensors based on silicon

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource
Language
Englisch

Bibliographic citation
Offset stable piezoresistive high-temperature pressure sensors based on silicon ; volume:5 ; number:1 ; year:2016 ; pages:197-203
Journal of sensors and sensor systems ; 5, Heft 1 (2016), 197-203

Creator
Täschner, Robert
Hiller, Erik
Blech, Michael

DOI
10.5194/jsss-5-197-2016
URN
urn:nbn:de:101:1-2017103013370
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:37 AM CEST

Data provider

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Associated

  • Täschner, Robert
  • Hiller, Erik
  • Blech, Michael

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