Offset stable piezoresistive high-temperature pressure sensors based on silicon
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Erschienen in
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Offset stable piezoresistive high-temperature pressure sensors based on silicon ; volume:5 ; number:1 ; year:2016 ; pages:197-203
Journal of sensors and sensor systems ; 5, Heft 1 (2016), 197-203
- Urheber
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Täschner, Robert
Hiller, Erik
Blech, Michael
- DOI
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10.5194/jsss-5-197-2016
- URN
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urn:nbn:de:101:1-2017103013370
- Rechteinformation
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:37 MESZ
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Beteiligte
- Täschner, Robert
- Hiller, Erik
- Blech, Michael
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