Hochschulschrift | Online-Publikation
Ion induced stress relaxation during the growth of cubic boron nitride thin films
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Anmerkungen
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Dresden, Techn. Univ., Diss., 2004
- Klassifikation
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Physik
- Schlagwort
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Bornitrid
Dünne Schicht
Magnetronsputtern
Röntgendiffraktometrie
Spannungsrelaxation
133078 ; Bornitrid ; Dünne Schicht ; Magnetronsputtern ; Röntgendiffraktometrie ; Spannungsrelaxation
- Urheber
- URN
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urn:nbn:de:swb:14-1093520583562-40470
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:54 MEZ
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Objekttyp
- Hochschulschrift
- Online-Publikation
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Pulsed laser micro ablation of polycrystalline cubic boron nitride
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