- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
Level set simulation of focused ion beam sputtering of a multilayer substrate ; volume:15 ; year:2024 ; pages:733-742
Beilstein journal of nanotechnology ; 15 (2024), 733-742
- Creator
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Rumyantsev, Alexander V.
Borgardt, Nikolai I.
Volkov, Roman L.
Chaplygin, Yuri A.
- DOI
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10.3762/bjnano.15.61
- URN
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urn:nbn:de:101:1-2409261227370.665432440953
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:23 AM CEST
Data provider
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Associated
- Rumyantsev, Alexander V.
- Borgardt, Nikolai I.
- Volkov, Roman L.
- Chaplygin, Yuri A.
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