Scanning and Splicing Atom Lithography for Self-traceable Nanograting Fabrication
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
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2520-8128
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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online resource.
- Bibliographic citation
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Scanning and Splicing Atom Lithography for Self-traceable Nanograting Fabrication ; volume:5 ; number:2 ; day:26 ; month:4 ; year:2022 ; pages:179-187 ; date:6.2022
Nanomanufacturing and metrology ; 5, Heft 2 (26.4.2022), 179-187, 6.2022
- Creator
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Deng, Xiao
Tan, Wen
Tang, Zhaohui
Lin, Zichao
Cheng, Xinbin
Li, Tongbao
- Contributor
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SpringerLink (Online service)
- DOI
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10.1007/s41871-022-00140-y
- URN
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urn:nbn:de:101:1-2022081920492302508830
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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15.08.2025, 7:28 AM CEST
Data provider
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Deng, Xiao
- Tan, Wen
- Tang, Zhaohui
- Lin, Zichao
- Cheng, Xinbin
- Li, Tongbao
- SpringerLink (Online service)