Scanning and Splicing Atom Lithography for Self-traceable Nanograting Fabrication

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
2520-8128
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Scanning and Splicing Atom Lithography for Self-traceable Nanograting Fabrication ; volume:5 ; number:2 ; day:26 ; month:4 ; year:2022 ; pages:179-187 ; date:6.2022
Nanomanufacturing and metrology ; 5, Heft 2 (26.4.2022), 179-187, 6.2022

Creator
Deng, Xiao
Tan, Wen
Tang, Zhaohui
Lin, Zichao
Cheng, Xinbin
Li, Tongbao
Contributor
SpringerLink (Online service)

DOI
10.1007/s41871-022-00140-y
URN
urn:nbn:de:101:1-2022081920492302508830
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:28 AM CEST

Data provider

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Associated

  • Deng, Xiao
  • Tan, Wen
  • Tang, Zhaohui
  • Lin, Zichao
  • Cheng, Xinbin
  • Li, Tongbao
  • SpringerLink (Online service)

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