3D passive microfluidic valves in silicon and glass using grayscale lithography and reactive ion etching transfer
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource, 12 Seiten
- Sprache
-
Englisch
- Erschienen in
-
In: Microfluidics and nanofluidics(27), H. 8 - ISSN 1613-4990
In: Springer, Heidelberg
- Ereignis
-
Veröffentlichung
- (wo)
-
Ilmenau
- (wer)
-
TU Ilmenau
- (wann)
-
2023
- Urheber
- DOI
-
10.1007/s10404-023-02663-2
- URN
-
urn:nbn:de:101:1-2409230309565.487223824282
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:51 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Beteiligte
- Phi, Hai Binh
- Bohm, Sebastian
- Runge, Erich
- Dittrich, Lars
- Strehle, Steffen
- TU Ilmenau
Entstanden
- 2023
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