- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
Digital Etching of Molybdenum Interconnects Using Plasma Oxidation ; day:12 ; month:11 ; year:2024 ; extent:7
Advanced materials interfaces ; (12.11.2024) (gesamt 7)
- Urheber
-
Erofeev, Ivan
Hartanto, Antony Winata
Khan, Muhaimin Mareum
Deng, Kerong
Kumar, Krishna
Aabdin, Zainul
Tjiu, Weng Weei
Zhang, Mingsheng
Pacco, Antoine
Philipsen, Harold
Chowdhuri, Angshuman Ray
Huynh, Han Vinh
Holsteyns, Frank
Mirsaidov, Utkur
- DOI
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10.1002/admi.202400558
- URN
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urn:nbn:de:101:1-2411131336282.183085235948
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:34 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Erofeev, Ivan
- Hartanto, Antony Winata
- Khan, Muhaimin Mareum
- Deng, Kerong
- Kumar, Krishna
- Aabdin, Zainul
- Tjiu, Weng Weei
- Zhang, Mingsheng
- Pacco, Antoine
- Philipsen, Harold
- Chowdhuri, Angshuman Ray
- Huynh, Han Vinh
- Holsteyns, Frank
- Mirsaidov, Utkur
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