Development of β-Ga2O3 layers growth on sapphire substrates employing modeling of precursors ratio in halide vapor phase epitaxy reactor

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
2045-2322
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Development of β-Ga2O3 layers growth on sapphire substrates employing modeling of precursors ratio in halide vapor phase epitaxy reactor ; volume:10 ; number:1 ; day:17 ; month:12 ; year:2020 ; pages:1-9 ; date:12.2020
Scientific reports ; 10, Heft 1 (17.12.2020), 1-9, 12.2020

Creator
Pozina, Galia
Hsu, Chih-Wei
Abrikossova, Natalia
Kaliteevski, Mikhail A.
Hemmingsson, Carl
Contributor
SpringerLink (Online service)

DOI
10.1038/s41598-020-79154-9
URN
urn:nbn:de:101:1-2021012019520689577420
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
20.08.2025, 2:51 PM CEST

Data provider

This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.

Associated

  • Pozina, Galia
  • Hsu, Chih-Wei
  • Abrikossova, Natalia
  • Kaliteevski, Mikhail A.
  • Hemmingsson, Carl
  • SpringerLink (Online service)

Other Objects (12)