Effective Passivation of Black Silicon Surfaces via Plasma‐Enhanced Chemical Vapor Deposition Grown Conformal Hydrogenated Amorphous Silicon Layer

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource
Language
Englisch

Bibliographic citation
Effective Passivation of Black Silicon Surfaces via Plasma‐Enhanced Chemical Vapor Deposition Grown Conformal Hydrogenated Amorphous Silicon Layer ; volume:14 ; number:1 ; year:2020 ; extent:7
Physica status solidi / Rapid research letters. Rapid research letters ; 14, Heft 1 (2020) (gesamt 7)

Creator
Özkol, Engin
Procel, Paul
Zhao, Yifeng
Mazzarella, Luana
Medlin, Rostislav
Šutta, Pavol
Isabella, Olindo
Zeman, Miro

DOI
10.1002/pssr.201900087
URN
urn:nbn:de:101:1-2022062706550975914283
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:22 AM CEST

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