Hochschulschrift
Investigation of the physical properties, performance and application of MEMS sensors based on bulk acoustic waves excited in piezoelectric thin film devices
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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Augsburg, Univ., Diss., 2007
- Classification
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Elektrotechnik, Elektronik
- Keyword
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MEMS ; Hochfrequenz ; Akustischer Sensor
- Creator
- URN
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urn:nbn:de:bvb:384-opus-6401
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:42 PM CET
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Object type
- Hochschulschrift
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