Hochschulschrift
Line edge roughness in optical critical dimension metrology
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783923560806
- Maße
-
21 cm
- Umfang
-
xxix, 121 Seiten
- Sprache
-
Englisch
- Anmerkungen
-
Illustrationen
Universität Stuttgart, Dissertation, 2015
- Erschienen in
-
Berichte aus dem Institut für Technische Optik / Universität Stuttgart ; Nr. 81
- Ereignis
-
Veröffentlichung
- (wo)
-
Stuttgart
- (wer)
-
Institut für Technische Optik der Universität Stuttgart
- (wann)
-
2016
- Urheber
- Inhaltsverzeichnis
- Rechteinformation
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Letzte Aktualisierung
-
11.03.2025, 12:28 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Objekttyp
- Hochschulschrift
Beteiligte
- Bilski, Bartosz
- Institut für Technische Optik der Universität Stuttgart
Entstanden
- 2016
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