- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2520-8128
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Analysis of Line-Edge Roughness Using EUV Scatterometry ; day:2 ; month:3 ; year:2022 ; pages:1-10
Nanomanufacturing and metrology ; (2.3.2022), 1-10
- Creator
- Contributor
-
SpringerLink (Online service)
- DOI
-
10.1007/s41871-022-00126-w
- URN
-
urn:nbn:de:101:1-2022052919432201873308
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
- 15.08.2025, 5:25 AM UTC
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Fernández Herrero, Analía
- Scholze, Frank
- Dai, Gaoliang
- Soltwisch, Victor
- SpringerLink (Online service)
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