Simultaneous large-scale reliability analysis of ultra-thin MOS gate dielectrics using an automated test system

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource
Language
Englisch

Bibliographic citation
Simultaneous large-scale reliability analysis of ultra-thin MOS gate dielectrics using an automated test system ; volume:6 ; year:2008 ; pages:205-207
Advances in radio science ; 6 (2008), 205-207

Creator
Domdey, A.
Hafkemeyer, K. M.
Krautschneider, W. H.
Schroeder, D.

DOI
10.5194/ars-6-205-2008
URN
urn:nbn:de:101:1-2018010219351
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.20252025, 1:19 AM CEST

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Associated

  • Domdey, A.
  • Hafkemeyer, K. M.
  • Krautschneider, W. H.
  • Schroeder, D.

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