MEMS shielded capacitive pressure and force sensors with excellent thermal stability and high operating temperature
Abstract: In this paper, we present an innovative manufacturing process for the production of capacitive pressure and force sensors with excellent thermal stability for high-temperature applications. The sensors, which are manufactured from a stack of two silicon chips mounted via with gold–silicon (Au-Si) or aluminum–silicon (Al-Si) eutectic bonding, are shielded, miniaturized, and allow an operating temperature of up to 500 °C. Compared to conventional methods, the greatest benefit of the manufacturing process is that different sensor dimensions can be produced in the same batch for a wide measuring range, from mN to kN. The characterization of the realized sensors shows a high linearity and a low temperature drift of 99.992% FS and −0.001% FS/K at 350 °C, as well as a nonlinearity of 0.035% FS and a temperature drift of −0.0027% FS/K at 500 °C
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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Sensors. - 23, 9 (2023) , 4248, ISSN: 1424-8220
- Event
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Veröffentlichung
- (where)
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Freiburg
- (who)
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Universität
- (when)
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2023
- DOI
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10.3390/s23094248
- URN
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urn:nbn:de:bsz:25-freidok-2358358
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:50 PM CET
Data provider
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
Time of origin
- 2023
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