Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Erschienen in
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Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range ; volume:8 ; number:2 ; year:2021 ; pages:81-85 ; extent:05
Energy Harvesting and Systems ; 8, Heft 2 (2021), 81-85 (gesamt 05)
- Urheber
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Ansari, Hamid Reza
Kordrostami, Zoheir
- DOI
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10.1515/ehs-2021-0017
- URN
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urn:nbn:de:101:1-2024030113164837069452
- Rechteinformation
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
- 14.08.2025, 10:57 MESZ
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Beteiligte
- Ansari, Hamid Reza
- Kordrostami, Zoheir
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