Hochschulschrift
Modeling and control of capacitive single- and dual-axis MEMS frame gyroscopes
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783844028652
- Maße
-
24 cm, 257 g
- Umfang
-
XIII, 159 S.
- Sprache
-
Englisch
- Anmerkungen
-
graph. Darst.
Zugl.: Wien, Techn. Univ., Diss., 2013
- Erschienen in
-
Modellierung und Regelung komplexer dynamischer Systeme ; Bd. 20
- Schlagwort
-
Drehratensensor
Kapazitiver Sensor
Gyroskop
MEMS
Mathematisches Modell
Reglerentwurf
- Ereignis
-
Veröffentlichung
- (wo)
-
Aachen
- (wer)
-
Shaker
- (wann)
-
2014
- Urheber
-
Mair, Florian
- Inhaltsverzeichnis
- Rechteinformation
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Letzte Aktualisierung
- 11.06.2025, 13:46 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Objekttyp
- Hochschulschrift
Beteiligte
- Mair, Florian
- Shaker
Entstanden
- 2014
Ähnliche Objekte (12)
Optimization of MEMS capacitive accelerometer
Capacitive silicon MEMS based combined accelerometer and gyroscope sensors in headlight levelling systems
MEMS shielded capacitive pressure and force sensors with excellent thermal stability and high operating temperature
Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range
MEMS capacitive pressure sensor monolithically integrated with CMOS readout circuit by using post CMOS processes
Development of a MEMS Technology for the Monolithic Post-CMOS Integration of Capacitive Pressure Sensors
Graphene MEMS and NEMS
BioMEMS : Fundamentals and Applications
Advances in MEMS, Optical MEMS, and Nanophotonics Technologies for Volatile Organic Compound Detection and Applications
Miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk
Carbon flow electrodes for continuous operation of capacitive deionization and capacitive mixing energy generation
3D and circuit integration of MEMS
Optimization of MEMS capacitive accelerometer
Capacitive silicon MEMS based combined accelerometer and gyroscope sensors in headlight levelling systems
MEMS shielded capacitive pressure and force sensors with excellent thermal stability and high operating temperature
Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range
MEMS capacitive pressure sensor monolithically integrated with CMOS readout circuit by using post CMOS processes
Development of a MEMS Technology for the Monolithic Post-CMOS Integration of Capacitive Pressure Sensors
Graphene MEMS and NEMS
BioMEMS : Fundamentals and Applications
Advances in MEMS, Optical MEMS, and Nanophotonics Technologies for Volatile Organic Compound Detection and Applications
Miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk
Carbon flow electrodes for continuous operation of capacitive deionization and capacitive mixing energy generation
3D and circuit integration of MEMS
Optimization of MEMS capacitive accelerometer
Capacitive silicon MEMS based combined accelerometer and gyroscope sensors in headlight levelling systems
MEMS shielded capacitive pressure and force sensors with excellent thermal stability and high operating temperature
Design and simulation of a MEMS MIM capacitive pressure sensor with high sensitivity in low pressure range
MEMS capacitive pressure sensor monolithically integrated with CMOS readout circuit by using post CMOS processes
Development of a MEMS Technology for the Monolithic Post-CMOS Integration of Capacitive Pressure Sensors
Graphene MEMS and NEMS
BioMEMS : Fundamentals and Applications
Advances in MEMS, Optical MEMS, and Nanophotonics Technologies for Volatile Organic Compound Detection and Applications
Miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk
Carbon flow electrodes for continuous operation of capacitive deionization and capacitive mixing energy generation