Experimental investigations of plasma dynamics in the hysteresis regime of reactive RF sputter processes
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Plasma sources science and technology, 31, 6, Artikel 065007, S. 065007-1-065007-12
- Event
-
Veröffentlichung
- (where)
-
Bochum
- (who)
-
Ruhr-Universität Bochum
- (when)
-
2022
- Creator
-
Roggendorf, Julian
Berger, Birk-Sören
Eremin, Denis
Oberberg, Moritz
Engel, Dennis
Wölfel, Christian
Zhang, Quan-Zhi
Awakowicz, Peter
Lunze, Jan
Schulze, Julian
- URN
-
urn:nbn:de:hbz:294-107674
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:54 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Roggendorf, Julian
- Berger, Birk-Sören
- Eremin, Denis
- Oberberg, Moritz
- Engel, Dennis
- Wölfel, Christian
- Zhang, Quan-Zhi
- Awakowicz, Peter
- Lunze, Jan
- Schulze, Julian
- Ruhr-Universität Bochum
Time of origin
- 2022
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