Experimental investigations of plasma dynamics in the hysteresis regime of reactive RF sputter processes
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Erschienen in
-
In: Plasma sources science and technology, 31, 6, Artikel 065007, S. 065007-1-065007-12
- Ereignis
-
Veröffentlichung
- (wo)
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Bochum
- (wer)
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Ruhr-Universität Bochum
- (wann)
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2022
- Urheber
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Roggendorf, Julian
Berger, Birk-Sören
Eremin, Denis
Oberberg, Moritz
Engel, Dennis
Wölfel, Christian
Zhang, Quan-Zhi
Awakowicz, Peter
Lunze, Jan
Schulze, Julian
- URN
-
urn:nbn:de:hbz:294-107674
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:54 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Roggendorf, Julian
- Berger, Birk-Sören
- Eremin, Denis
- Oberberg, Moritz
- Engel, Dennis
- Wölfel, Christian
- Zhang, Quan-Zhi
- Awakowicz, Peter
- Lunze, Jan
- Schulze, Julian
- Ruhr-Universität Bochum
Entstanden
- 2022
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