Localized direct material removal and deposition by nanoscale field emission scanning probes
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource, 5 Seiten
- Sprache
-
Deutsch
- Erschienen in
-
In: Micro and nano engineering(16), S.1-5 - ISSN 2590-0072
In: Elsevier, Amsterdam
- Ereignis
-
Veröffentlichung
- (wo)
-
Ilmenau
- (wer)
-
TU Ilmenau
- (wann)
-
2022
- Urheber
- DOI
-
10.1016/j.mne.2022.100146
- URN
-
urn:nbn:de:101:1-2022110702062508099279
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:36 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Hofmann, Martin
- Holz, Mathias
- Plank, Harald
- Strehle, Steffen
- TU Ilmenau
Entstanden
- 2022
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