Optical Properties of Sputtered Tantalum Nitride Films Determined by Spectroscopic Ellipsometry
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Notes
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In: Oral contributed presentation; 4th Workshop Ellipsometry, 20-22 February 2006, Berlin, Germany
- Keyword
-
Diffusionsbarriere
Dünne Schicht
Ellipsometrie
Magnetronsputtern
Metallisieren
Mikroelektronik
Optische Eigenschaft
Tantal
- Event
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Veröffentlichung
- (where)
-
Chemnitz
- (who)
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Universitätsbibliothek Chemnitz
- (when)
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2006
- Event
-
Veröffentlichung
- (where)
-
Chemnitz
- (who)
-
Technische Universität Chemnitz
- (when)
-
2006
- Creator
- URN
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urn:nbn:de:swb:ch1-200600325
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:56 AM CEST
Data provider
This object is provided by:
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Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Wächtler, Thomas
- Gruska, Bernd
- Zimmermann, Sven
- Schulz, Stefan E.
- Gessner, Thomas
- Universitätsbibliothek Chemnitz
- Technische Universität Chemnitz
Time of origin
- 2006
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