Cost effective MEMS fabrication of a Thermoelectric Nanowire Characterization Platform (TNCP)
Abstract: To decrease the cleanroom requirement of a MEMS chip fabrication, Nd:YAG laser machining is integrated into silicon micromachining. However, to get a smooth surface the laser parameters must be chosen carefully, and a subsequent wet chemical etching treatment of the surface is essential.
The process is used to fabricate a Thermoelectric Nanowire Characterization Platform (TNCP). Our TNCPs are designed to measure a single nanowire's thermoelectric properties: heat and electrical conduction, and the Seebeeck coefficient. Furthermore it has the unique ability to also study the crystallographic structure of these nanowires by transmission electron microscopy (TEM)
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
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Procedia engineering. - 120 (2015) , 210-214, ISSN: 1877-7058
- Ereignis
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Veröffentlichung
- (wo)
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Freiburg
- (wer)
-
Universität
- (wann)
-
2019
- DOI
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10.1016/j.proeng.2015.08.612
- URN
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urn:nbn:de:bsz:25-freidok-1266572
- Rechteinformation
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Kein Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:53 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Moosavi, Seyedeh Hoda
- Kröner, Michael
- Woias, Peter
- Universität
Entstanden
- 2019
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