Refining silicon nitride waveguide quality through femtosecond laser annealing

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
1 Online-Ressource.
Language
Englisch

Bibliographic citation
Refining silicon nitride waveguide quality through femtosecond laser annealing ; volume:14 ; number:1 ; day:8 ; month:7 ; year:2024 ; pages:1-10 ; date:12.2024
Scientific reports ; 14, Heft 1 (8.7.2024), 1-10, 12.2024

Creator
Wang, Pei-Hsun
Chen, Chien-Hung
Hou, Nien-Lin
Cao, Jia-Hao
Zheng, He-Yuan
Chen, Hung-Wen
Contributor
SpringerLink (Online service)

DOI
10.1038/s41598-024-66707-5
URN
urn:nbn:de:101:1-2409252102402.313041020314
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:33 AM CEST

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Associated

  • Wang, Pei-Hsun
  • Chen, Chien-Hung
  • Hou, Nien-Lin
  • Cao, Jia-Hao
  • Zheng, He-Yuan
  • Chen, Hung-Wen
  • SpringerLink (Online service)

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