Refining silicon nitride waveguide quality through femtosecond laser annealing
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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1 Online-Ressource.
- Sprache
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Englisch
- Erschienen in
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Refining silicon nitride waveguide quality through femtosecond laser annealing ; volume:14 ; number:1 ; day:8 ; month:7 ; year:2024 ; pages:1-10 ; date:12.2024
Scientific reports ; 14, Heft 1 (8.7.2024), 1-10, 12.2024
- Urheber
-
Wang, Pei-Hsun
Chen, Chien-Hung
Hou, Nien-Lin
Cao, Jia-Hao
Zheng, He-Yuan
Chen, Hung-Wen
- Beteiligte Personen und Organisationen
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SpringerLink (Online service)
- DOI
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10.1038/s41598-024-66707-5
- URN
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urn:nbn:de:101:1-2409252102402.313041020314
- Rechteinformation
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:33 MESZ
Datenpartner
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Beteiligte
- Wang, Pei-Hsun
- Chen, Chien-Hung
- Hou, Nien-Lin
- Cao, Jia-Hao
- Zheng, He-Yuan
- Chen, Hung-Wen
- SpringerLink (Online service)
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