Shape and functional elements of bulk silicon microtechnique : a manual of wet etched silicon structures
This manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. A systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications is given. It includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. Especially written for producers of sensors and microtechnical components. it serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon. TOC:Intention.- Technological Basis of the Bulk-Silicon Microtechnique.- General Overview of the Shape- and functional Elements of the {100}- Bulk- Silicon- Microtechnique.- Simple Shape Elelments.- Elements for Mechanical Applications. Elements for Fluidic Applications.- Elements withOptical Applicationas.- Physical Properties of Silicon.
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
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9783540221098
3540221093
- Dimensions
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24 cm
- Extent
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XII, 221 S.
- Language
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Englisch
- Notes
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Ill., graph. Darst.
Literaturangaben
- Classification
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Ingenieurwissenschaften und Maschinenbau
- Keyword
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Silicium
Nassätzen
Mikrosystemtechnik
- Event
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Veröffentlichung
- (where)
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Berlin, Heidelberg, New York
- (who)
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Springer
- (when)
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2005
- Creator
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Frühauf, Joachim
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.06.2025, 2:24 PM CEST
Data provider
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Frühauf, Joachim
- Springer
Time of origin
- 2005
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Reconfigurable field-effect transistors based on wet-chemically etched silicon nanostructures
Electroless etched silicon nanostructures for solar energy conversion
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Size-dependent Fano Interaction in the Laser-etched Silicon Nanostructures
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Wet anisotropic etching characteristics of Si111} in NaOH-based solution for silicon bulk micromachining
Wet chemical textures for crystalline silicon solar cells
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Structure and physical properties of silicon clusters and of vacancy clusters in bulk silicon
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