Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Bibliographic citation
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Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon ; volume:216 ; number:17 ; year:2019 ; extent:7
Physica status solidi / A. A, Applications and materials science ; 216, Heft 17 (2019) (gesamt 7)
- Creator
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Beljakowa, Svetlana
Pichler, Peter
Kalkofen, Bodo
Hübner, René
- DOI
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10.1002/pssa.201900306
- URN
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urn:nbn:de:101:1-2022080806353225138874
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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15.08.2025, 7:26 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Beljakowa, Svetlana
- Pichler, Peter
- Kalkofen, Bodo
- Hübner, René
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Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
Applications of boron nitrogen and boron phosphorus adducts in organometallic chemistry
Metastable atomic layer deposition
Particle atomic layer deposition
Electronic band offset determination of oxides grown by atomic layer deposition on silicon
Structural chemistry of Boron and Silicon
Structural chemistry of boron and silicon
Enhancing of catalytic properties of vanadia via surface doping with phosphorus using atomic layer deposition
Dispersion Energy‐Stabilized Boron and Phosphorus Lewis Pairs
Atomic Layer Deposition of Boron‐Doped Al 2 O 3 Dielectric Films
Absence of free carriers in silicon nanocrystals grown from phosphorus- and boron-doped silicon-rich oxide and oxynitride
Absence of free carriers in silicon nanocrystals grown from phosphorus- and boron-doped silicon-rich oxide and oxynitride
Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
Applications of boron nitrogen and boron phosphorus adducts in organometallic chemistry
Metastable atomic layer deposition
Particle atomic layer deposition
Electronic band offset determination of oxides grown by atomic layer deposition on silicon
Structural chemistry of Boron and Silicon
Structural chemistry of boron and silicon
Enhancing of catalytic properties of vanadia via surface doping with phosphorus using atomic layer deposition
Dispersion Energy‐Stabilized Boron and Phosphorus Lewis Pairs
Atomic Layer Deposition of Boron‐Doped Al 2 O 3 Dielectric Films
Absence of free carriers in silicon nanocrystals grown from phosphorus- and boron-doped silicon-rich oxide and oxynitride
Absence of free carriers in silicon nanocrystals grown from phosphorus- and boron-doped silicon-rich oxide and oxynitride
Direct Growth of Al2O3 on Black Phosphorus by Plasma-Enhanced Atomic Layer Deposition
Applications of boron nitrogen and boron phosphorus adducts in organometallic chemistry
Metastable atomic layer deposition
Particle atomic layer deposition
Electronic band offset determination of oxides grown by atomic layer deposition on silicon
Structural chemistry of Boron and Silicon
Structural chemistry of boron and silicon
Enhancing of catalytic properties of vanadia via surface doping with phosphorus using atomic layer deposition