An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
1 Online-Ressource.
- Sprache
-
Englisch
- Erschienen in
-
An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement ; volume:9 ; number:1 ; day:6 ; month:3 ; year:2023 ; pages:1-13 ; date:12.2023
Microsystems & nanoengineering ; 9, Heft 1 (6.3.2023), 1-13, 12.2023
- Urheber
-
Gong, Xuewen
Kuo, Yu-Chun
Zhou, Guodong
Wu, Wen-Jong
Liao, Wei-Hsin
- Beteiligte Personen und Organisationen
-
SpringerLink (Online service)
- DOI
-
10.1038/s41378-023-00484-5
- URN
-
urn:nbn:de:101:1-2408130954494.500756916392
- Rechteinformation
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:48 MESZ
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Beteiligte
- Gong, Xuewen
- Kuo, Yu-Chun
- Zhou, Guodong
- Wu, Wen-Jong
- Liao, Wei-Hsin
- SpringerLink (Online service)
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