An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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1 Online-Ressource.
- Language
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Englisch
- Bibliographic citation
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An aerosol deposition based MEMS piezoelectric accelerometer for low noise measurement ; volume:9 ; number:1 ; day:6 ; month:3 ; year:2023 ; pages:1-13 ; date:12.2023
Microsystems & nanoengineering ; 9, Heft 1 (6.3.2023), 1-13, 12.2023
- Creator
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Gong, Xuewen
Kuo, Yu-Chun
Zhou, Guodong
Wu, Wen-Jong
Liao, Wei-Hsin
- Contributor
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SpringerLink (Online service)
- DOI
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10.1038/s41378-023-00484-5
- URN
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urn:nbn:de:101:1-2408130954494.500756916392
- Rights
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Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:48 AM CEST
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Associated
- Gong, Xuewen
- Kuo, Yu-Chun
- Zhou, Guodong
- Wu, Wen-Jong
- Liao, Wei-Hsin
- SpringerLink (Online service)
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