Fabrication and characterization of CMOS-compatible perforated micromembranes for biomedical applications

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Abstract: We report the optimized wafer-scale fabrication of microporous membranes for applications in the biomedical field such as cell filtration. Existing similar devices can mostly not be integrated on CMOS circuits or mass fabricated. Both is enabled here by the exclusive use of scalable and low temperature microsystems technology methods on silicon wafers. The successfully manufactured devices are characterized with regard to the feasibility of an integrated clogging detection or captured cell counter. The results from electrochemical measurements across the chips match the calculations from a corresponding theoretical model well, verifying the described concept. Further electrical functionalities may thus be integrated into the micromembrane device in the future, equipping it for new applications and allowing a more efficient solution for existing tasks of similar devices.

Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: Online-Ressource

Language: Englisch

Bibliographic citation: Fabrication and characterization of CMOS-compatible perforated micromembranes for biomedical applications ; volume:9 ; number:1 ; year:2023 ; pages:439-442 ; extent:4
Current directions in biomedical engineering ; 9, Heft 1 (2023), 439-442 (gesamt 4)

Creator: Brechmann, Noah
Michel, Marvin
Bola, Alina
Renz, Franziska
Pickhinke, Andreas
Seidl, Karsten

DOI: 10.1515/cdbme-2023-1110

URN: urn:nbn:de:101:1-2023092214083528088005

Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 14.08.2025, 10:58 AM CEST

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Brechmann, Noah
Michel, Marvin
Bola, Alina
Renz, Franziska
Pickhinke, Andreas
Seidl, Karsten

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Fabrication and characterization of CMOS-compatible perforated micromembranes for biomedical applications

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