CMOS compatible 2T pixel for on-wafer in-situ EUV detection

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Location: Deutsche Nationalbibliothek Frankfurt am Main

Extent: Online-Ressource, 1 online resource.

Language: Englisch

Bibliographic citation: CMOS compatible 2T pixel for on-wafer in-situ EUV detection ; volume:18 ; number:1 ; day:20 ; month:6 ; year:2023 ; pages:1-10 ; date:12.2023
Discover nano ; 18, Heft 1 (20.6.2023), 1-10, 12.2023

Creator: Lin, Wei-Hwa
Huang, Han-Lin
Wu, Pin-Jiun
Lin, Chrong-Jung
King, Ya-Chin

Contributor: SpringerLink (Online service)

DOI: 10.1186/s11671-023-03836-2

URN: urn:nbn:de:101:1-2023092209244098443048

Rights: Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.

Last update: 14.08.2025, 10:51 AM CEST

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Lin, Wei-Hwa
Huang, Han-Lin
Wu, Pin-Jiun
Lin, Chrong-Jung
King, Ya-Chin
SpringerLink (Online service)

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CMOS compatible 2T pixel for on-wafer in-situ EUV detection

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Other Objects (12)

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