Laser processing of thin films and microstructures : oxidation, deposition and etching of insulators
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783540179511
3540179518
9780387179513
0387179518
- Dimensions
-
24 cm
- Extent
-
VIII, 320 S.
- Language
-
Englisch
- Notes
-
77 graph. Darst.
Literaturverz. S. 287 - 313
- Bibliographic citation
-
Springer series in materials science ; Vol. 3
- Keyword
-
Dielektrische Schicht
Laserbearbeitung
Mikrostruktur
Laserbearbeitung
Laser
Laser
- Event
-
Veröffentlichung
- (where)
-
Berlin, Heidelberg, New York, London, Paris, Tokyo
- (who)
-
Springer
- (when)
-
1987
- Creator
-
Boyd, Ian W.
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.06.2025, 2:16 PM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Boyd, Ian W.
- Springer
Time of origin
- 1987
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