Ion formation in an argon and argon-oxygen gas mixture of a magnetron sputtering discharge
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Journal of Physics Communications 3, 5, 055011
- Keyword
-
-
- Event
-
Veröffentlichung
- (where)
-
Greifswald
- (who)
-
Universität Greifswald
- (when)
-
2019
- Creator
-
Hippler, R.
Cada, M.
Stranak, V.
Hubicka, Z.
- DOI
-
10.1088/2399-6528/ab1e82
- URN
-
urn:nbn:de:gbv:9-opus-58926
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:33 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Hippler, R.
- Cada, M.
- Stranak, V.
- Hubicka, Z.
- Universität Greifswald
Time of origin
- 2019
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