Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Erschienen in
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In: Lampouras, I.; Holz, M.; Strehle, S.; Körner, J.: Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride. In: Journal of Micromechanics and Microengineering 34 (2024), Nr. 1, 015005. DOI: https://doi.org/10.1088/1361-6439/ad0d80
- Ereignis
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Veröffentlichung
- (wo)
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Hannover
- (wer)
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Gottfried Wilhelm Leibniz Universität Hannover
- (wann)
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2023
- Ereignis
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Veröffentlichung
- (wo)
-
Hannover
- (wer)
-
Technische Informationsbibliothek (TIB)
- (wann)
-
2023
- Urheber
- DOI
-
10.15488/16934
- URN
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urn:nbn:de:101:1-2024041102323216264257
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
14.08.2025, 10:54 MESZ
Datenpartner
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Beteiligte
- Lampouras, Ioannis
- Holz, Mathias
- Strehle, Steffen
- Körner, Julia
- Gottfried Wilhelm Leibniz Universität Hannover
- Technische Informationsbibliothek (TIB)
Entstanden
- 2023
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