- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Anmerkungen
-
Bochum, Ruhr-Universität Bochum, Dissertation, 2017
- Klassifikation
-
Physik
- Schlagwort
-
Simulation
Entladung
Sputtern
Kinetische Theorie
Abscheidung
- Ereignis
-
Veröffentlichung
- (wo)
-
Bochum
- (wer)
-
Ruhr-Universität Bochum
- (wann)
-
2017
- Urheber
- Beteiligte Personen und Organisationen
-
Mussenbrock, Thomas
Awakowicz, Peter
- URN
-
urn:nbn:de:hbz:294-53077
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:54 MEZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Objekttyp
- Hochschulschrift
Beteiligte
- Trieschmann, Jan
- Mussenbrock, Thomas
- Awakowicz, Peter
- Ruhr-Universität Bochum
Entstanden
- 2017
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