Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Erschienen in
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Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition ; volume:9 ; pages:2581-2598
Beilstein journal of nanotechnology ; 9, 2581-2598
- Klassifikation
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Ingenieurwissenschaften und Maschinenbau
- DOI
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10.3762/bjnano.9.240
- URN
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urn:nbn:de:101:1-2019012911213042543430
- Rechteinformation
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Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
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14.08.2025, 10:46 MESZ
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