Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource
Language
Englisch

Bibliographic citation
Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition ; volume:9 ; pages:2581-2598
Beilstein journal of nanotechnology ; 9, 2581-2598

Classification
Ingenieurwissenschaften und Maschinenbau

DOI
10.3762/bjnano.9.240
URN
urn:nbn:de:101:1-2019012911213042543430
Rights
Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:46 AM CEST

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