Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Bibliographic citation
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Pattern generation for direct-write three-dimensional nanoscale structures via focused electron beam induced deposition ; volume:9 ; pages:2581-2598
Beilstein journal of nanotechnology ; 9, 2581-2598
- Classification
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Ingenieurwissenschaften und Maschinenbau
- DOI
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10.3762/bjnano.9.240
- URN
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urn:nbn:de:101:1-2019012911213042543430
- Rights
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Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
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14.08.2025, 10:46 AM CEST
Data provider
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.