A self-centering and stiffness-controlled MEMS accelerometer

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
1 Online-Ressource.
Language
Englisch

Bibliographic citation
A self-centering and stiffness-controlled MEMS accelerometer ; volume:10 ; number:1 ; day:18 ; month:1 ; year:2024 ; pages:1-14 ; date:12.2024
Microsystems & nanoengineering ; 10, Heft 1 (18.1.2024), 1-14, 12.2024

Classification
Elektrotechnik, Elektronik

Creator
Jin, Yiming
Ma, Zhipeng
Ye, Ziyi
Li, Mingkang
Zheng, Xudong
Jin, Zhonghe
Contributor
SpringerLink (Online service)

DOI
10.1038/s41378-023-00647-4
URN
urn:nbn:de:101:1-2024033111001784609394
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:56 AM CEST

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Associated

  • Jin, Yiming
  • Ma, Zhipeng
  • Ye, Ziyi
  • Li, Mingkang
  • Zheng, Xudong
  • Jin, Zhonghe
  • SpringerLink (Online service)

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