Correlation of stress in silicon nitride layers with their complete removal by laser ablation
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: Energy Procedia ; 38 (2013). - S. 707-712. - ISSN 1876-6102. - eISSN 1876-6102
- Klassifikation
-
Industrielle und handwerkliche Fertigung
- Ereignis
-
Veröffentlichung
- (wo)
-
Konstanz
- (wer)
-
Bibliothek der Universität Konstanz
- (wann)
-
2013
- Beteiligte Personen und Organisationen
-
Engelhardt, Josh
Ohl, Sibylle
Hahn, Giso
Terheiden, Barbara
- URN
-
urn:nbn:de:bsz:352-250241
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:44 MEZ
Datenpartner
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Beteiligte
- Engelhardt, Josh
- Ohl, Sibylle
- Hahn, Giso
- Terheiden, Barbara
- Bibliothek der Universität Konstanz
Entstanden
- 2013
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