Nanoscale Structuring in Confined Geometries using Atomic Layer Deposition: Conformal Coating and Nanocavity Formation
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
-
Englisch
- Bibliographic citation
-
In: Zeitschrift für Physikalische Chemie, 232, (7-8), De Gruyter, ISSN 0942-9352
- Event
-
Veröffentlichung
- (where)
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Darmstadt
- (who)
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Universitäts- und Landesbibliothek
- (when)
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2024
- Creator
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Ruff, Philip
Carrillo-Solano, Mercedes
Ulrich, Nils
Hadley, Andrea
Kluth, Patrick
Toimil-Molares, Maria Eugenia
Trautmann, Christina
Hess, Christian
- DOI
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10.26083/tuprints-00026936
- URN
-
urn:nbn:de:tuda-tuprints-269362
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
25.03.2025, 1:58 PM CET
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Ruff, Philip
- Carrillo-Solano, Mercedes
- Ulrich, Nils
- Hadley, Andrea
- Kluth, Patrick
- Toimil-Molares, Maria Eugenia
- Trautmann, Christina
- Hess, Christian
- Universitäts- und Landesbibliothek
Time of origin
- 2024
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