Nanoscale Structuring in Confined Geometries using Atomic Layer Deposition: Conformal Coating and Nanocavity Formation
- Standort
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Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
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Online-Ressource
- Sprache
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Englisch
- Erschienen in
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In: Zeitschrift für Physikalische Chemie, 232, (7-8), De Gruyter, ISSN 0942-9352
- Ereignis
-
Veröffentlichung
- (wo)
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Darmstadt
- (wer)
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Universitäts- und Landesbibliothek
- (wann)
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2024
- Urheber
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Ruff, Philip
Carrillo-Solano, Mercedes
Ulrich, Nils
Hadley, Andrea
Kluth, Patrick
Toimil-Molares, Maria Eugenia
Trautmann, Christina
Hess, Christian
- DOI
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10.26083/tuprints-00026936
- URN
-
urn:nbn:de:tuda-tuprints-269362
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
25.03.2025, 13:58 MEZ
Datenpartner
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Beteiligte
- Ruff, Philip
- Carrillo-Solano, Mercedes
- Ulrich, Nils
- Hadley, Andrea
- Kluth, Patrick
- Toimil-Molares, Maria Eugenia
- Trautmann, Christina
- Hess, Christian
- Universitäts- und Landesbibliothek
Entstanden
- 2024
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