Aufsatzsammlung

Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range

The quantitative determination of the properties of micro- and nanostructures is essential in research and development. Here, peer-reviewed papers are presented with contributions for the NanoScale 2004 seminar at the Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany in March 2004. Topics include problems of quantitative measurement as well as methods of calibration, correction and instrumentation. The seminar stimulates the exchange of information between users in science and industry and manufacturers of the relevant hard- and software.

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISBN
352740502X
9783527405022
Dimensions
25 cm
Extent
XXII, 519 S.
Language
Englisch
Notes
Ill., graph. Darst.
Literaturangaben

Classification
Ingenieurwissenschaften und Maschinenbau
Keyword
Messtechnik
Mikrometerbereich
Messtechnik
Nanometerbereich

Event
Veröffentlichung
(where)
Weinheim
(who)
Wiley-VCH
(when)
2005
Contributor

Table of contents
Rights
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
Last update
11.03.2025, 12:29 PM CET

Data provider

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Object type

  • Aufsatzsammlung

Associated

Time of origin

  • 2005

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