Aufsatzsammlung
Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range
The quantitative determination of the properties of micro- and nanostructures is essential in research and development. Here, peer-reviewed papers are presented with contributions for the NanoScale 2004 seminar at the Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany in March 2004. Topics include problems of quantitative measurement as well as methods of calibration, correction and instrumentation. The seminar stimulates the exchange of information between users in science and industry and manufacturers of the relevant hard- and software.
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
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352740502X
9783527405022
- Dimensions
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25 cm
- Extent
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XXII, 519 S.
- Language
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Englisch
- Notes
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Ill., graph. Darst.
Literaturangaben
- Classification
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Ingenieurwissenschaften und Maschinenbau
- Keyword
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Messtechnik
Mikrometerbereich
Messtechnik
Nanometerbereich
- Table of contents
- Rights
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Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
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11.03.2025, 12:29 PM CET
Data provider
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Object type
- Aufsatzsammlung
Associated
- Wilkening, Günter
- Wiley-VCH
Time of origin
- 2005