- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783540858485
- Maße
-
24 cm
- Umfang
-
XXIV, 732 S.
- Sprache
-
Englisch
- Anmerkungen
-
Ill., graph. Darst.
Literturverz. S. 669 - 703
- Schlagwort
-
Niederdruckplasma
Hochfrequenzentladung
Ionenstrahlbearbeitung
Plasmadiagnostik
PECVD-Verfahren
Sputtern
Plasmaätzen
- Inhaltsverzeichnis
- Rechteinformation
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Letzte Aktualisierung
-
11.06.2025, 14:13 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Deutsche Nationalbibliothek. Bei Fragen zum Objekt wenden Sie sich bitte an den Datenpartner.
Beteiligte
- Franz, Gerhard
- Springer
Entstanden
- 2009
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