- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISBN
-
9783540858485
- Dimensions
-
24 cm
- Extent
-
XXIV, 732 S.
- Language
-
Englisch
- Notes
-
Ill., graph. Darst.
Literturverz. S. 669 - 703
- Keyword
-
Niederdruckplasma
Hochfrequenzentladung
Ionenstrahlbearbeitung
Plasmadiagnostik
PECVD-Verfahren
Sputtern
Plasmaätzen
- Table of contents
- Rights
-
Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.
- Last update
-
11.06.2025, 2:13 PM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Franz, Gerhard
- Springer
Time of origin
- 2009
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