Separated effects of neutrals, ions, metastables and photons on the properties of plasma deposited functional coatings
- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
Bochum, Ruhr-Universität Bochum, Dissertation, 2023
- Keyword
-
Niederdruckplasma
Plasmadiagnostik
Niederdruckplasma
Plasma
Beschichtung
Diagnostik
Vakuum-UV-Spektroskopie
- Event
-
Veröffentlichung
- (where)
-
Bochum
- (who)
-
Ruhr-Universität Bochum
- (when)
-
2024
- Creator
- Contributor
- URN
-
urn:nbn:de:hbz:294-125660
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
14.08.2025, 10:59 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Biskup, Beatrix
- Benedikt, Jan
- Keudell, Achim von
- Fakultät für Physik und Astronomie
- Ruhr-Universität Bochum
Time of origin
- 2024
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