Introduction to spectroscopic ellipsometry of thin film materials : instrumentation, data analysis, and applications

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Location: Deutsche Nationalbibliothek Frankfurt am Main

ISBN: 9783527349517
3527349510

Dimensions: 25 cm, 408 g

Extent: x, 187 Seiten

Language: Englisch

Notes: Illustrationen

Classification: Physik

Event: Veröffentlichung

(where): Weinheim, Germany

(who): WILEY-VCH

(when): [2022]

Creator: Wee, Andrew T. S.
Yin, Xinmao
Tang, Chi Sin

Contributor: Wiley-VCH

Table of contents: https://d-nb.info/1245235397/04

Rights: Bei diesem Objekt liegt nur das Inhaltsverzeichnis digital vor. Der Zugriff darauf ist unbeschränkt möglich.

Last update: 11.06.2025, 2:11 PM CEST

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[2022]

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Introduction to spectroscopic ellipsometry of thin film materials : instrumentation, data analysis, and applications

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