Temporary Surface Passivation for Characterisation of Bulk Defects in Silicon: A Review

Location
Deutsche Nationalbibliothek Frankfurt am Main
Extent
Online-Ressource
Language
Englisch

Bibliographic citation
Temporary Surface Passivation for Characterisation of Bulk Defects in Silicon: A Review ; volume:11 ; number:11 ; year:2017 ; extent:18
Physica status solidi / Rapid research letters. Rapid research letters ; 11, Heft 11 (2017) (gesamt 18)

Creator
Grant, Nicholas E.
Murphy, John D.

DOI
10.1002/pssr.201700243
URN
urn:nbn:de:101:1-2022093008422658348671
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
15.08.2025, 7:30 AM CEST

Data provider

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Associated

  • Grant, Nicholas E.
  • Murphy, John D.

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