- Location
-
Deutsche Nationalbibliothek Frankfurt am Main
- ISSN
-
2196-7237
- Extent
-
Online-Ressource
- Language
-
Englisch
- Notes
-
online resource.
- Bibliographic citation
-
Dry Etching of Germanium with Laser Induced Reactive Micro Plasma ; volume:8 ; number:3 ; day:16 ; month:6 ; year:2021 ; pages:237-255 ; date:9.2021
Lasers in manufacturing and materials processing ; 8, Heft 3 (16.6.2021), 237-255, 9.2021
- Creator
-
Ehrhardt, Martin
Lorenz, Pierre
Bauer, Jens
Heinke, Robert
Hossain, Mohammad Afaque
Han, Bing
Zimmer, Klaus
- Contributor
-
SpringerLink (Online service)
- DOI
-
10.1007/s40516-021-00147-1
- URN
-
urn:nbn:de:101:1-2021110705560036986896
- Rights
-
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:27 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Ehrhardt, Martin
- Lorenz, Pierre
- Bauer, Jens
- Heinke, Robert
- Hossain, Mohammad Afaque
- Han, Bing
- Zimmer, Klaus
- SpringerLink (Online service)
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