Wafer bow in diamond heteroepitaxy: causes, their analytical description, and viable solutions
- Standort
-
Deutsche Nationalbibliothek Frankfurt am Main
- Umfang
-
Online-Ressource
- Sprache
-
Englisch
- Erschienen in
-
In: Journal of Applied Physics, 137, 1, S. 015108-
- Ereignis
-
Veröffentlichung
- (wo)
-
Augsburg
- (wer)
-
Universität Augsburg
- (wann)
-
2025
- Ereignis
-
Veröffentlichung
- (wo)
-
Melville, NY
- (wer)
-
AIP Publishing
- (wann)
-
2025
- Urheber
- DOI
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10.1063/5.0245362
- URN
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urn:nbn:de:bvb:384-opus4-1185337
- Rechteinformation
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Letzte Aktualisierung
-
15.08.2025, 07:24 MESZ
Datenpartner
Dieses Objekt wird bereitgestellt von:
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Beteiligte
- Schreck, Matthias
- Peter, Theodor
- Universität Augsburg
- AIP Publishing
Entstanden
- 2025
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