Wafer bow in diamond heteroepitaxy: causes, their analytical description, and viable solutions
- Location
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Deutsche Nationalbibliothek Frankfurt am Main
- Extent
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Online-Ressource
- Language
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Englisch
- Bibliographic citation
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In: Journal of Applied Physics, 137, 1, S. 015108-
- Event
-
Veröffentlichung
- (where)
-
Augsburg
- (who)
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Universität Augsburg
- (when)
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2025
- Event
-
Veröffentlichung
- (where)
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Melville, NY
- (who)
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AIP Publishing
- (when)
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2025
- Creator
- DOI
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10.1063/5.0245362
- URN
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urn:nbn:de:bvb:384-opus4-1185337
- Rights
-
Der Zugriff auf das Objekt ist unbeschränkt möglich.
- Last update
-
15.08.2025, 7:24 AM CEST
Data provider
This object is provided by:
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Deutsche Nationalbibliothek. If you have any questions about the object, please contact the data provider.
Associated
- Schreck, Matthias
- Peter, Theodor
- Universität Augsburg
- AIP Publishing
Time of origin
- 2025
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