Fabrication of buried nanostructures by atomic layer deposition

Location
Deutsche Nationalbibliothek Frankfurt am Main
ISSN
2045-2322
Extent
Online-Ressource
Language
Englisch
Notes
online resource.

Bibliographic citation
Fabrication of buried nanostructures by atomic layer deposition ; volume:8 ; number:1 ; day:10 ; month:10 ; year:2018 ; pages:1-10 ; date:12.2018
Scientific reports ; 8, Heft 1 (10.10.2018), 1-10, 12.2018

Creator
Ali, Rizwan
Contributor
Saleem, Muhammad Rizwan
Roussey, Matthieu
Turunen, Jari
Honkanen, Seppo
SpringerLink (Online service)

DOI
10.1038/s41598-018-33036-3
URN
urn:nbn:de:101:1-2018111406452868445778
Rights
Open Access; Der Zugriff auf das Objekt ist unbeschränkt möglich.
Last update
14.08.2025, 10:45 AM CEST

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Associated

  • Ali, Rizwan
  • Saleem, Muhammad Rizwan
  • Roussey, Matthieu
  • Turunen, Jari
  • Honkanen, Seppo
  • SpringerLink (Online service)

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